Characterization and Performance Estimation of a MEMS Spirometer
Sahar Habibiabad, Yeşim Serinağaoğlu Doğrusöz, Mustafa İlker Beyaz · Procedia Engineering · 2016
The electrical characteristics and performance estimation of a MEMS spirometer is reported. The device design incorporates a silicon turbine, integrated magnets, ball bearings, and stators having planar coils. Pneumatic actuation of the turbine with tangential gas flow induces voltages on the stators. Spirometer parameters including breathing flow rate and lung capacity can be determined from the induced voltage amplitude and frequency. Two 12-pole stators with 25- and 50-turns per pole were fabricated. The resistance and inductance values were measured to be 3.9 kΩ and 2.6 mH, and 15.8 kΩ and 10.3 mH, respectively. The expected sensitivity of the devices was calculated to be 0.1 V/lpm and 0.2 V/lpm for the 25- and 50-turns per pole stators, respectively. The integration of all device components will lead to a compact and low-cost spirometer for patient self-monitoring.