B11-P-15Limit Less Panorama: an automated super large TEM panoramic image recording system
Nobuya Mamizu, Hidetaka Fukushima, Hideo Nishioka, Hiromitsu Furukawa · Microscopy · 2015
Panoramic image is synthesized from multiple images shot while moving the field of view (FOV). It is useful for the observation of the large area in spite of high resolution. In Transmission Electron Microscopes (TEM), electron beam deflectors are typically used to shift FOV and, in this case, the range of deflector movement limits the panoramic image size. On the other hand, the panoramic imaging method in Scanning Electron Microscopes (SEM) generally employs the mechanical stage drive that has practically no limitation on the range of movement. So far, it is difficult to apply the SEM method to TEM because of the difference in the observation magnification and the stage control mechanism between two. By developing an integrated deflector shift and mechanical stage shift control protocol, we have introduced the Limit Less Panorama (LLP) system that records panoramic images without the FOV restriction in TEM. LLP system automatically processes from shooting images until synthesizing a panoramic image; generates high quality super large panorama that is difficult to process manually or otherwise.