NOR virtual ground (NVG)-a new scaling concept for very high density flash EEPROM and its implementation in a 0.5 um process

Albert Bergemont, H. Haggag, L. Anderson, E. Shacham, G.R. Wolstenholme · 2002

A new NOR virtual ground flash cell array concept is introduced. A 2.4 um/sup 2/ cell size based on a 0.5 um process is realized, which is a 35% cell size reduction compared with the conventional NOR cell.>

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