A trend mining method for yield improvement based on trend in time series
Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara · International Symposium on Semiconductor Manufacturing · 2008
We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.