An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation
John J. Helmsen, Edward W. Scheckler, Andrew R. Neureuther, Carlo H. Séquin · 2005
An algorithm is presented for efficiently removing loops from triangular meshes which represent moving surfaces in integrated circuit fabrication process simulation. Tliis algorithm has O(N log N+Ni log Ni) time for meshes normally encountered, where N is the number of triangles in the mesh and Ni is the number of pairs of intersecting triangles. A spatial sort based on an octtree data structure is used to determine the region of surface self intersection. Triangles are cut into smaller triangles so that the surface self intersection region occurs along mesh edges and loop removal is facilitated. A simplified version of the algorithm is deqonstrated on some test cases, and results are discussed.