Integrated Circuits: Chemical and Physical Processing
Pieter Stroeve · ACS symposium series · 1985
The fabrication of integrated circuits is very complex. The intricacy of a particular process can be understood by considering the individual unit processes used to make the product. Key unit processes are consistently used in the manufacture of integrated circuits. An improved understanding of the basic physical and chemical fundamentals of each process will help the manufacturing engineer in controlling the uniformity of the product or to design new processes.