Advanced system for CMOS SOI test structures measurements
Ivan I. Shvetsov-Shilovskiy, Pavel V. Nekrasov, Anastasia V. Ulanova, Alexander Y. Nikiforov · 2016
The article considers modernized CMOS SOI test structure measurement system that allows one to control characteristics of both separate transistors and VLSI blocks during experiment. Changes made in hardware and software parts of the measurement setup are discussed and reasoned.