NAND technology
Krishna K. Parat · 2013
NAND Flash has a simple array structure which has been highly amenable to scaling; NAND Flash leads the industry in scaling; Lithography induced scaling limits were overcome using advanced pitch reduction techniques; Interference issues were contained through incorporation of air-gap at critical locations; Wrap cell limits were overcome with planar FG cell using High-K dielectric / Metal gate; 2D scaling can continue into the mid to low ~10nm; Scaling beyond can come from transitioning to 3D.