Micro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities

James L. Zunino, Donald R. Skelton, Robert Bryan Mason · 2005

As the United States (U.S.) Army transforms into a lighter, more lethal, and more agile force, the technologies embedded in both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army as well as entire Department of Defense (DOD). Even though the DOD plans to increase the usage of MEMS devices, there have been limited studies performed to determine their reliability and failure mechanisms. No standardized test protocols exist for assessing reliability. Accordingly, the U.S. Army Corrosion Office at Picatinny, NJ has initiated the MEMS Reliability Assessment Program to address this issue.

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