Study on Bulk Acoustic Wave Microwave Delay Line with High Reliability
Jinglei Yang · Piezoelectrics and Acoustooptics · 2008
A microwave bulk acoustic wave delay line with centre frequency f0=4 300 MHz,bandwidth Δf-3 dB≥200 MHz,delay time Δt=0.358 μs was developed by optimized transducer design,double sides Photolithography,supersonic wire bonding and fully hermetic package technologies.The device had high reliability and excellent adaptability validated by experimentations with satisfactorily practical effect.