Pt resistance temperature micro-sensor for low temperature measurement
Dannong He · Transducer and Microsystem Technologies · 2013
Currently Pt resistance temperature sensor is mainly deployed for the measurement of the temperature higher than 73K that is-200 ℃.Pt resistance temperature microsensor for low temperature region range of 10K(-263 ℃) ~200K(-73 ℃)is studied.The symmetrical turn back structure which effectively reduces the influence of impendence of the alternating current(AC)is designed.The Pt film with thickness of 200 nm is deposited by magnetron direct current(DC)sputtering process.The relationship between resistance and temperature of Pt microsensor is characterized by QD PPMS instrument,and TCR can achieve 9 980 ×10-6/K while T30K(-243 ℃),and 3 730 ×10-6/K while T30K(-243 ℃)respectively.