Application of the closed loop control in the ion source discharge
Shihua Song, Chundong Hu, Sheng Liu, Sheng Peng, Xie Yahong · Hedianzixue yu tance jishu · 2007
The thesis introduces a feedback control system which is designed to control the gas supply of the ion source.The system consists of an A/D data acquisition card and a D/A output card,which are used as the data input and control output of the digital signal processing system.The digital PID control- ler is realized by the software.The gas valve is controlled by regulating the parameter.The structure of the system and the experiment results are described in the thesis.