Inductive Displacement Sensor and Its Circuit with Deep-Submicron Accuracy
Yu Pu · Chuangan jishu xuebao · 2006
Aimed at the existing circumstances that traditional indnctive displacement sensors and its measuring systems can not satisfy requirements both in precision and in sampling frequency,the paper introduces a measuring method for high-precision dynamic displacement measuring.Using half-bridge inductive sensors as probes,basing on integrated signal-processing circuit and Δ-Σ Analog-to-Digital converter,the system combined high-speed over-sampling method with average-filtering method to fulfill the precision measurement of dynamic micron-displacement.Experimental data proves that stability performances better than ±0.01μm when speed is limited under 100 Hz.