Research on automatic alignment system of dicing machine based on matlab
Min Xiao · Machinery Design and Manufacture · 2012
The working principle of a full automatic dicing saw alignment system is investigated in it.The simplified calculation method is presented by using matched template.The wafer channel obtained from the processed image data with the edge detection achieves the channel center line through using curve fitting,and then the location of the wafer alignment is pinpointed.This experiment and Matlab simulation show that this automatic recognition program can efficiently recognize the wafer channel and satisfy the technical requirements.