Releasing Control Policy for Semiconductor Wafer Fabrication Based on Fuzzy Petri Nets-Reasoning
Zhengcai Cao, Zhao Huidan, Yongji Wang · Dianzi xuebao · 2011
(1) College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China; (2) State Key Laboratory of Computer Science, Institute of Software, Chinese Acad. of Sci., Beijing 100080, China