A DeviceNet Bus-Based Control System Design for Rapid Thermal Processor
Long Hui-yue · Industrial heating · 2010
A DeviceNet bus-based control system for rapid thermal processor system has been presented. First, the hard architecture of this control system has been described. The distinct character of this control system is a open and expandable system that it is adapt to the numble of the processing chambers can be changed by custom' s needs. Second, a hiberarchy and modulization soft system has been presended and summarized. Lastl, a temperature controller has been designed for this control system of RTP. The temperature controller is combined feed forward and feedback mechanisms. The feed forward mechanism is used to calculate a prediction of output of the system, so it can improve responding rapidity of control system. The feedback mechanism is used to compensate for modeling errors and disturbance. This control system for RTP has been implemented and evaluated by simulation as well as experimental equipment.