Uncertainty Evaluation of EPA’s electrostatic potential
Junlin Li · Journal of Changchun University of Science and Technology · 2013
Electrostatic potential of electrostatic discharge protected area(EPA) is an important indicator for anti-static work area.Adopting the electrostatic voltage tester EFM-022 to measure the electrostatic potential of EPA,the paper proposed common method of uncertainty evaluation of electrostatic potential’s measurement.Firstly,analyzed the measurement principle of the electrostatic potential,and established the deriving mathematical model of measurement results,determined the source of two types measurement uncertainty;secondly,evaluated measurement uncertainty of electrostatic potential;Finally,derived common uncertainty formula to ensure the measurement accuracy of the EPA’s electrostatic potential from uncertainty theoretically.