Overload Protection Design of Silicon Pressure Sensor
Wang Xu-jian · Yibiao jishu yu chuanganqi · 2010
This paper was to achieve the overload protection for pressure sensor through the structural design of measuring silicon membrane and the structural design of external protection.Differential pressure sensor adopted the design of coupling protection between positive and negative chambers and central overload protective membrane,before the overload pressure reaches super high value,the membrane at higher pressure side keeps close to the body,and the membrane at lower pressure side is bulged,to prevent the super high differential pressure transferring into the sensor.Gauge and absolute pressure sensors adopted the design of coupling protection between measuring and overload protective membrane,before the overload pressure reaches super high value,measuring membrane keep close to the body,and the overload membrane is bulged, to prevent the super high pressure transferring into the sensor.