Experiment Study on the Destructive Measurement of the Depth of SSD for Optical Material
WU Yu-lie · Hangkong jingmi zhizao jishu · 2006
Constancy of chemical etch rate method was modified so as to reduce the influencing factors such as temperature and concentration of HF acid.The efficiency and accuracy are improved.The modified method was used to measure the SSD.The experimental results were compared with the theoretical value and the differences were analyzed.