Controller of multi-axis motorized optical stages based on DAQ card and multiplexer
Wei Zhimeng, Kaiyong Yang · Jiguang zazhi · 2010
A controller of multi-axis motorized optical stages based on DAQ card and Multiplexer was established and applied in total integrated scatterometer.Utilizing DAQ board's digital output and counter output to send address signals to multiplexer and pulse signals to stepper motor drivers,the controller provides point-to-point positioning applications for the optical stages.Independent controller software and subroutine program are developed with LabView.the controller's hardware and software are completely embedded in the scatterometer.