Petri Net Based Modeling Approach for Semiconductor Manufacturing System
Qidi Wu · Jisuanji gongcheng · 2005
The applications of Petri nets in semiconductor manufacturing system are reviewed. Aiming at some special complexities of semiconductor manufacturing system, such as large-scale,reentrance, reliability, mixed processing, uncertainty and so on, various extended Petri net models, as well as their modeling approaches are analyzed and compared. Then the problems are discussed and the further research of semiconductor manufacturing system based on Petri net is given.