VFSA Application in Ellipsometry Data Computing and the Improvement Tactics of the Algorithm
Wang Qi-xi · Modern Machinery · 2005
According to comparing with simulation annealing algorithm the paper introduce very fast simulation annealing algorithm and use VFSA to compute the ellipsometry data.The result of calculation prove that the method have been improvement on the precision of calculation of the ellipsometry data some extent,then the paper analyses the annealing scheme of the algorithm and model(perturbation,) at last proposing the improvement tactics of the algorithm.