The Modeling, Simulation and Logic Analysis of Cluster Tools for Semiconductor Manufacture
Zhimin Wu · Microcomputer Information · 2009
Cluster tools (CT) are the critical, and usually, the bottleneck equipment. Quantized the performance of the cluster tools is significant to the analysis of production efficiency and cost prediction. Petri nets are a promising graphical and mathematical modeling tool applicable to many systems for describing and studying information systems that are characterized as being parallel, concurrent, asynchronous, distributed, nondeterministic, and/or stochastic. In this paper, we proposed a detailed process to build a Timed Color Petri net (TCPN) model for dual-robot-arm-dual-chamber cluster tools using CPN Tools developed by University of Aarhus.