Fault Diagnosis of PECVD Device Based on Bayesian Networks
LU Meng-xi · Semiconductor Technology · 2006
An application of Bayesian networks in the area of equipment fault diagnosis is provided. The basic concepts and principle of fault diagnosis technology based on Bayesian networks are introduced. The mutual effect between fault nodes and test nodes is analyzed. An example of the vacuum system in PECVD is given to show the application of Bayesian networks diagnostics in the semiconductor equipment troubleshooting using GeNIe software.