A SMALL-SIZE ARC-DISCHARGE ION-SOURCE
Bai G · 1987
The article describes a small-size are discharge ion source.Some of its basic parametersare measured by combining the arc discharge with the electron oscillation.The ion current is7 mA.It can produce multi-charge ions.The extraction structure is commonly used by thissource and the r.f.ion source.This ion source has been used in a 400 keV ion implanter inBeijing Normal University and it is stable in operation.