Design of GaAs threshold voltage uni formity measurement system
Zhu Chao · Gongneng cailiao yu qijian xuebao · 2001
The principle and the method of GaAs threshold voltage measurement was i ntroduced.AΦ3GaAs threshold voltage automatic me asurement system was designed.This system consists of automatic prober,measurement system and soft ware.The orientation precision of t he prober is 10μm,the resolving power is 2.4μm ,the speed is 251mm /s .The precisio n of Vth measurement is 1mV.This system can carry out automatic measurement of MESFETs ' parameters onΦ3GaAs wafer .It can save the data,map theΦ3GaAs threshold voltage.It can also measure the resistivity,backgate effect and so on.