Petri Net-Based Modeling and Analysis for Semiconductor Wafer Fabrication System
Qian Xing-san · Systems Engineering-Theory Methodology Application · 2004
There are re-entrant, concurrence, resource sharing, stochastic rework and unpredicted machine beakdown in semiconductor wafer fabrication line, which make the fab management and scheduling more complex. Modeling the system is a premise work to optimize the properties of the system, in this paper, the advantages of using Petri net modeling the system are pointed out. Then, a Petri net model representing a re-entrant line with four work centers and eight machines is presented, and the analysis for this model is provided. At the end, the aim of next-step work is put forward.