The realize of an editor for MEMS process
Jinghui Xu · Machinery Design and Manufacture · 2007
To solve the various process of MEMS,a software for the process edit is designed in this paper.The chief aim of this editor is to output the process file,which can be imported to the geometry emulation of device.The work presented in this paper focuses on several aspects of the following:firstly,the process characteristic parameter is summarized;then the editor is realized by the programming language of TCL/TK,which make the editor can be run on several computing platforms,such as Windows,Unix;finally,the process file and.cif file of micro-gyroscope is imported to geometry emulation,the result is answer for the design structure,which proved the validity of the process file.