Approaches to Synthesis of a CMOS Accelerometer
Vishal Gupta · 2000
Abstract : A synthesis framework for automated design of CMOS MEMS accelerometers from high-level behavioral specifications is presented. Two approaches to synthesis are discussed. The equation-based synthesis approach requires lumped parameter model equations to characterize the behavior of the device being synthesized. With these equations and constraints on the device behavior, the synthesis problem is formulated into a non-linear constrained optimization problem, where objective functions are also used to guide the search for a solution in the design space. The second approach, simulation-based synthesis, uses a nodal simulator (NODAS) to evaluate the behavior of a proposed design during an annealing-based search for an optimal design. This approach formulates the synthesis problem into an unconstrained optimization problem. For both of these approaches, the algorithms, the implementations, the results and the relative pros and cons are discussed in detail. A comparison of synthesized designs with manual designs suggest significant optimization possibilities for MEMS design by using CAD tools. Experimental measurements are also presented in order to verify the synthesis results.