Perspectives of microsystem engineering developments in Russia
P. P. Maltsev · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002
Modem status of technique of new generation and "critical" technologies in a number of the most developed countries is characterized by Microsystem technology dynamic development from the beginning of the 90-th years ("microsystems technology " - MST) that determined the creation of a new scientific and technical direction - "microsystem engineering " ("mirosystems engineering " MSE).