Construction of a Humidity Generator by Divided Flow Method
Chiharu Takahashi, Teruko Inamatsu, Hiroshi Kitano · Transactions of the Society of Instrument and Control Engineers · 1988
A humidity generator using divided flow method was constructed for trial. The principle, the structure and the characteristics of the generator are described. The accuracy of mass flow meters and the efficiency of saturators were investigated. The cause of errors of the generator is discussed and the accuracy of the generator is estimated.The generator was compared with the high precision two-pressure and two-temperature humidity generator, using a quartz crystal dew-point hygrometer. The humidity value of the air produced by these two generators showed a good agreement with an accuracy of ±0.5% and it is confirmed that a divided flow humidity generator can be used as a working standard for the calibration of humidity sensors.