Fundamental Properties of the Pressure Sensor using Piezoelectric Ceramics.
Tomohide NIIMI, Tetsuo FUJIMOTO, Kenichi WADA · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 1991
Impedance of the piezoelectric ceramics indicates a peculiar frequency characteristic, when the alternating current is supplied to the ceramics. The frequency characteristic around a resonant frequency changes greatly due to distortion of the ceramics. Using this property which is caused by the pressure difference between the two sides of the ceramics, the pressure sensor is divised. In this study, it is shown that the sensor is effective in measuring pressure. The fundamental properties of the sensor, especially the sensitivity to pressure and the dependence on temperature, are examined.