A Framework for Calibration of Barometric MEMS Pressure Sensors
Andreas Dickow, Gregor Feiertag · Procedia Engineering · 2014
Barometric MEMS pressure sensors must be calibrated at several temperatures and pressures. The fewer calibration points are needed to fulfill a sensor specification, the faster sensor production is. This paper proposes a polynomial approach for determining optimal sensor calibration, using the minimum number of calibration points necessary. In an experiment the framework is applied to the following sensor types: Bosch BMP085, Bosch BMP180, and EPCOS T5400. Influences of temperature operation range and pressure range are discussed in the experiment. Further, optimal calibration point suggestions are identified.