Design, Simulation, Fabrication and Characterization of a Pressure Sensor arranged in Wheatstone Piezoresistive Bridge
Alessandro Camolesi, Pablo R. de Souza, Fabiano Fruett · ECS Transactions · 2007
In this paper, a Wheatstone piezoresistive bridge was designed, simulated, fabricated and characterized. The Finite Elements Method was used to simulate both: the piezoeffect in a single-resistor and the stress-induced unbalance in a Wheatstone piezoresistive bridge. The process, used to fabricate the Wheatstone piezoresistive bridge sensor, is totally CMOS compatible.