Modeling of a Multifunctional Pressure-Temperature Sensor
Ali Najafi Sohi, Mohammad Shavezipur, Patricia M. Nieva, Amir Khajepour · 2009
Development of new sensors with precise and innovative measurement mechanisms is a key in underpinning the competitiveness of industries like automotive, aviation, and power generation. Due to progresses made in micromachining technologies, fabrication of such sensors for multifunctional applications and their integration with readout circuits is easily achievable. In this paper a new multifunctional sensor for the simultaneous measurement of pressure and temperature is proposed and modeled. It uses membranes and beams as active bodies and capacitance measurement as readout system. The sensor can be fabricated with available CMOS-compatible foundry processes. The results of the finite element simulations are presented for pressures up to 1 MPa and temperature changes up to 250 °C.