Analytical software design case: MagLev Stage software design
Guy H. Broadfoot · 2005
This case is about the control software in a "Stage"; a unit designed for high precision movements in high vacuum environments, usually in the semiconductor manufacturing machines. The unit is developed and manufactured by Philips Applied Technologies. It uses magnetic levitation and linear induction. It incorporates two multi-axis controllers, each of which controls one set of magnetic servos and provides 6 degrees of freedom. It provides sub-micron accuracy and repeatability. The overview of the control software architecture is discussed. The method developed by Verum is called ASD and combines sequence based specification techniques with process algebra and model checking. (9 pages)