Apparatus for measuring the capacitance-voltage characteristics of semiconductor devices with an extended frequency range
В. А. Сергеев, I. V. Frolov, R. N. Mukhometzianov · 2014
An upgraded automated installation for higher capacity resolution measuring the capacitance-voltage characteristics of semiconductor devices is described. The system is based on the principle of converting the measured capacitance to the frequency of the LC generator. Measurement capacity is in the range of three frequencies: 100 kHz, 500 kHz, 1 MHz.