Development of a XY Piezoelectric Nanopositioner
Guilherme Aires Loberto, Escola Politécnica, Mello Moraes, André Mechhi, Gilder Nader, Emílio Carlos, Nelli Silva · 2003
Piezoelectric actuators are applied as force, pressure and acceleration sensors and most recently to the design of micro and nanopositioners. In this project three piezo-nanopositioner XY were developed which consist essentially of piezoelectric ceramics bonded to a compliant mechanism that can amplify the ceramic displacement. In a compliant mechanism the movement is due to the flexibility of the structure instead of the presence of joints and pins. As design performance, it is desired to obtain the maximum possible displacement with a piezoelectric ceramic with a minimum crosstalk between displacements X and Y. To evaluate these design characteristics, FEM models of the three actuators were built and simulated using the finite element commercial software ANSYS. With the results of maximum displacement and the crosstak levels between X and Y displacements it is possible to evaluate the quality of the nanopositioner designed. Prototypes of XY nanopositioners were manufactured in micromachining laboratory of Sincroton Light National Laboratory (LNLS - Campinas) through the lithography technique based on chemical corrosion of 60 μm and 100 μm thickness copper plates. As future work, displacements and the crosstalk levels generated by nanopositioners should be measured through laser interferometry.