An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab
Lihui Wu, Dengjie Zhu, Zhaoyun Wu · Advances in engineering research/Advances in Engineering Research · 2015
To analyze the performance of automated Interbay material handling system in semiconductor wafer fabrication system, an Object-oriented and Colored Timed Petri Net (OCTPN) model was presented.The model could describe the practical hardware and operation considerations of Interbay system, such as transportation rail, shortcut, stocker and routing of overhead hoist transporters.To decrease complexity of modeling process, these practical hardware and operation considerations of Interbay system were encapsulated with object class.Therefore, the OCTPN model could be re-configurable and re-usable.With data from an Interbay material handling system of 200 mm semiconductor wafer fab, an illustrative example is built to evaluate the model.The result shows that the proposed OCTPN model is effective.