An impedance analyzer of semiconductor structures in the infra-low frequency range
V. N. V’yukhin · Instruments and Experimental Techniques · 2015
An impedance analyzer of semiconductor structures at infralow frequencies is designed. The analyzer contains a remote measuring head placed near the studied structure and an electronic unit connected to the computer via a USB interface. The analyzer measures the capacitance, conductivity, and current of a structure in a frequency range of 0.01–10 Hz. The measurement ranges of the capacitance value are 10, 100, and 1000 pF, of the current—25, 250, and 2500 pA, and of the conductivity—10, 100, and 1000 pS.