Low Level Signal Measure-ments for Piezoresistive and Capacitive MEMS Sensor
KM Anil, Sunita Panda, Rajat K. Das, Rudra Pratap · NOT FOUND REPOSITORY (Indian Institute of Science Bangalore) · 2009
In this work, a signal conditioning system for micro-volt measurement is designed and developed for characterizing a piezoresistive load cell. The main objective is to improve signal to noise ratio, so that better resolution can be achieved. Along with the signal conditioning system, a low capacitance measurement system is designed and developed for characterizing capacitive MEMS sensors. Accurate measurements in the pico to femto Farad level and compensation for parasitic capacitance are the main objectives.