Interference Displacement Measurement of Semiconductor Pressure Sensor
Tomasz Pancewicz · Kluwer Academic Publishers eBooks · 2005
The paper deals with the deflection measurement of membrane of the semiconductor pressure sensor under load. Optical interferometry was applied to measure deflection. On the base of obtained deformation the state of stress in the membrane is determined. Description of the experimental set-up, results and the analysis of measurement accuracy are presented. These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.