Research Of Piezo-resistive And Piezoelectric Sensor
Sanming Feng, Wenjie Tian, Bo Ma · 2015
The basic principle and application of piezo-resistive and piezoelectric are expounded.Also the method of deposition of tantalum nitride on the glass to fabricate piezo-resistive pressure sensor, and the method of a plurality of piezoelectric thin film in parallel to form a high sensitivity sensor are introduced.Besides, a power supply circuit and corresponding processing circuit are designed.The output voltage of the piezo-resistive pressure sensor is liner with respect to the pressure.The output of the charge is liner with the pressure of piezoelectric sensor first, then tends to saturation and presents less change.The sensitivity of piezoelectric sensor is up to 10 3 orders of magnitude, with a higher sensitivity.