Algorithm to Measure the Interested Feature from SEM Image
Wirote Angart, Sirichai Rujipattanapong · ITC-CSCC :International Technical Conference on Circuits Systems, Computers and Communications · 2007
The image from the Scanning Electron Microscopy (SEM) is effectively used to analyze the fine detail of object's surface in micrometer range. But the image from SEM has to be manually measured using the scale bar provided in the image as reference. Thus it can cause error in reading the length of the small object. In this paper, an algorithm, which uses MATLAB functions to implement, to automatically measure the length of small object, which is polymer fiber in this study, is developed. This algorithm uses Canny method to detect edge of image. After that, Hough Transform is applied to help find the direction of line. The experiment is set to measure the diameter of polymer fiber image at different zoom rate. The results show that the standard deviation (SD) is about zero.