Site-controlled Ge quantum dot growth on Si by the use of electron beam pre-patterning
Magnus T. Borgström, Vilma Zela, W. Seifert, Lars Samuelson · Lund University Publications (Lund University) · 2002
By growth of Si on substrates that have been pre-patterned by electron-beam induced carbon nano-growth masks, nano-holes form at the Si surface. We have grown self-assembled Ge quantum dots in these holes by ultra high vacuum chemical vapour phase deposition (UHV-CVD). We usually find four dots in each hole. By varying the amount of deposited Ge, we can obtain either four dome-shaped or four pyramid-shaped dots in the majority of holes. These dot arrangements could be used for the realisation of the simplest functional cell for quantum-dot cellular automata (QCA)