A Comparative Performance Analysis Of Capacitive And Piezoresistive MEMS For Pressure Measurement
Muniba Shaikh, S. F. Kodad, B. C. Jinaga · 2008
Paper describes the design and simulation of capacitive and piezoresistive MEMS for pressure measurement. Performance measurement parameters ie. Sensitivity and deflection of both the sensors are compared through simulated results. The comparison helps the user to know the suitability of sensors for various applications. It will also help manufactures to know the change in behavior and performance of a sensor due to change in geometrical parameters of the sensors such L/h ratio, thickness etc.