StudyofElectrically Programmable Fusesthrough Series ofI-VMeasurements
Hiroyuki Suto, Shigetaka Mon, Michihiro Kanno · 2006
Electrically programmable fuses (e-Fuse) [1-9] withNi-silicided poly-Si filament fabricated onfourdopant conditions werestudied through twosuccessive I-Vmeasurements. Theinitial I-Vsweeps canchange e-fuses into targeted programmed states anddisplay the wholeprogramming processes wherethecurrents change inmany orders ofmagnitude. Thesecond I-Vcurves canshowthestabilities andconductions intheprogrammed states onbothbiaspolarities. Theprogramming processes inquasi-programmed states before properly programming werefoundtobestrongly dependent onthe dopant conditions. Andatleast twoorthree properly programmed states wereidentified amongproperly programmed states intermsof thecharacteristic spreads ofthefinal resistance andtheconduction behaviors. Themostdistinctive currents after properly programming aresimilar tothose invaristors. Thestability inevery programmed state turned outtobedependent strongly onthedopant conditions.