Characterization ofSemiconductor Devices atVeryHighTemperatures
Peter Borthen · 2008
Wepresent adedicated measurement set-up fortheelectrical characterization of semiconductor devices andmicrosystems underveryhightemperature conditions. Theexperimental set-up comprises avacuum system asbasic unit andanumber of sample stages fordifferent applications. Thesystem enables measurements inthe temperature rangebetween roomtemperature andatleast 700°C. Wegivea detailed description ofthemeasurement system, sample mounting techniques, and exemplary measurements onsilicon andSiCdevices andtest structures.