Modeling and Simulation of High Sensitivity Pressure Sensor with Current Mirror Sensing Based Ring Channel Shaped Bridge Structure Embedded on a Circular Diaphragm
Steffy Joy, Teenu Tom, Jobin K. Antony · 2014
Introduction: The integration of CMOSMEMS technology in developing pressure sensors helps in reduction of area and improvement of sensitivity especially in biomedical applications . This paper reports on the design and simulation of CMOSMEMS integrated current mirror sensing based MOSFET ring shaped channel bridge structure embedded on a circular diaphragm with free edges.