Analysis of Electron Energy Distribution Function from a Langmuir ProbeDataUsing the
J. M. Choe, Dai-Gyoung Kim · 2006
Electron energydistribution function (EEDF) fromtheLangmuirprobe(LP)dataisimportant inthe analysis of accurateplasmadensity and electron temperature. Thedetermination ofEEDF requires the2nd derivative ofLP datawithrespect totheprobevoltage, whichmayenhance thenoises intheprobedataseriously. In orderto filter thenoiseeffectively, thewavelet transformation technique, especially thebi-orthogonal wavelet transform (BWT),wasadapted toseparate the noises fromthe2ndderivative LP data.Theaccuracy of algorithm basedontheBWT wasevaluated withvarious noiselevels fortheMaxwellian distribution electrons. It provides the EEDF withoutlosingthe important information thathasan advantage ofminimizing the operator's choices toprecede theanalysis ofLPdata.